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Top > Technology & Products/Non-Contact 3D Measurement > OptiPro Non-Contact Metrology System "UltraSurf 5X"

High precision 5-Axis non-contact metrology system
OptiPro Non-Contact Metrology System "UltraSurf 5X"

OptiPro UltraSurf

Feature

All axes are made of the highest quality air bearings and linear motor technology available. A variety of probe options allow for sub-micron single and dual surface scanning of precision optical components.
OptiPro's innovative software provides comprehensive contour analysis, coordinate control features and surface texture analysis for roughness and p-v waviness profiles.
ASCII data export provides a seamless integration to standard optical fabrication platforms.



Current Measurement Abilities
Ogive Inside Figure Error Ogive Outside Figure Error

Specification

UltraSurf 5X 100
Axis X,Y,Z B C
Travel 100mm 360° 360°
Resolution 5nm 0.274sec 0.274sec
Max. Velocity 30mm/s 6RPM 6RPM

UltraSurf 5X 200
Axis X,Y,Z B C
Travel 200mm 360° 360°
Resolution 5nm 0.274sec 0.274sec
Max. Velocity 30mm/s 6RPM 6RPM